7/13/2012	1:11:28 AM	Helium valve closed
7/13/2012	1:11:28 AM	H2 valve closed
7/13/2012	1:11:28 AM	BCl3 valve closed
7/13/2012	1:11:28 AM	PH3 valve closed
7/13/2012	1:11:28 AM	SiCl4 pre valve closed
7/13/2012	1:11:28 AM	SiCl4 post valve closed
7/13/2012	1:11:28 AM	Main Vac valve closed
7/13/2012	1:11:28 AM	Bypass valve closed
7/13/2012	1:11:28 AM	Bubbler valve closed
7/13/2012	1:11:28 AM	Helium MFC set to  0.000000
7/13/2012	1:11:28 AM	H2 MFC set to  0.000000
7/13/2012	1:11:28 AM	BCl3 MFC set to  0.000000
7/13/2012	1:11:28 AM	PH3 MFC set to  0.000000
7/13/2012	1:11:28 AM	SiCl4 MFC set to  0.000000
7/13/2012	1:11:28 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:11:29 AM	Tube furnace set to 0
7/13/2012	1:11:32 AM	Helium valve closed
7/13/2012	1:11:32 AM	BCl3 valve closed
7/13/2012	1:11:32 AM	PH3 valve closed
7/13/2012	1:11:32 AM	SiCl4 pre valve closed
7/13/2012	1:11:32 AM	SiCl4 post valve closed
7/13/2012	1:11:32 AM	Main Vac valve closed
7/13/2012	1:11:32 AM	Bypass valve closed
7/13/2012	1:11:32 AM	Bubbler valve closed
7/13/2012	1:11:32 AM	H2 valve opened
7/13/2012	1:11:32 AM	Helium MFC set to  0.000000
7/13/2012	1:11:32 AM	H2 MFC set to  500.000000
7/13/2012	1:11:32 AM	BCl3 MFC set to  0.000000
7/13/2012	1:11:32 AM	PH3 MFC set to  0.000000
7/13/2012	1:11:32 AM	SiCl4 MFC set to  0.000000
7/13/2012	1:11:32 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:11:32 AM	Tube furnace set to 0
7/13/2012	1:12:47 AM	Helium valve closed
7/13/2012	1:12:47 AM	BCl3 valve closed
7/13/2012	1:12:47 AM	PH3 valve closed
7/13/2012	1:12:47 AM	SiCl4 pre valve closed
7/13/2012	1:12:47 AM	SiCl4 post valve closed
7/13/2012	1:12:47 AM	Main Vac valve closed
7/13/2012	1:12:47 AM	Bypass valve closed
7/13/2012	1:12:47 AM	H2 valve opened
7/13/2012	1:12:47 AM	Bubbler valve opened
7/13/2012	1:12:47 AM	Helium MFC set to  0.000000
7/13/2012	1:12:47 AM	H2 MFC set to  500.000000
7/13/2012	1:12:47 AM	BCl3 MFC set to  0.000000
7/13/2012	1:12:47 AM	PH3 MFC set to  0.000000
7/13/2012	1:12:47 AM	SiCl4 MFC set to  0.000000
7/13/2012	1:12:47 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:12:47 AM	Tube furnace set to 0
7/13/2012	1:12:48 AM	Helium valve closed
7/13/2012	1:12:48 AM	BCl3 valve closed
7/13/2012	1:12:48 AM	PH3 valve closed
7/13/2012	1:12:48 AM	SiCl4 pre valve closed
7/13/2012	1:12:48 AM	SiCl4 post valve closed
7/13/2012	1:12:48 AM	Main Vac valve closed
7/13/2012	1:12:48 AM	Bypass valve closed
7/13/2012	1:12:48 AM	H2 valve opened
7/13/2012	1:12:48 AM	Bubbler valve opened
7/13/2012	1:12:48 AM	Helium MFC set to  0.000000
7/13/2012	1:12:48 AM	H2 MFC set to  500.000000
7/13/2012	1:12:48 AM	BCl3 MFC set to  0.000000
7/13/2012	1:12:48 AM	PH3 MFC set to  0.000000
7/13/2012	1:12:48 AM	SiCl4 MFC set to  0.000000
7/13/2012	1:12:48 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:12:48 AM	Tube furnace set to 1000
7/13/2012	1:37:48 AM	Helium valve closed
7/13/2012	1:37:48 AM	PH3 valve closed
7/13/2012	1:37:48 AM	Main Vac valve closed
7/13/2012	1:37:48 AM	Bypass valve closed
7/13/2012	1:37:48 AM	H2 valve opened
7/13/2012	1:37:48 AM	BCl3 valve opened
7/13/2012	1:37:48 AM	SiCl4 pre valve opened
7/13/2012	1:37:48 AM	SiCl4 post valve opened
7/13/2012	1:37:48 AM	Bubbler valve opened
7/13/2012	1:37:48 AM	Helium MFC set to  0.000000
7/13/2012	1:37:48 AM	H2 MFC set to  450.000000
7/13/2012	1:37:48 AM	BCl3 MFC set to  1.000000
7/13/2012	1:37:48 AM	PH3 MFC set to  0.000000
7/13/2012	1:37:48 AM	SiCl4 MFC set to  50.000000
7/13/2012	1:37:48 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:37:48 AM	Tube furnace set to 1000
7/13/2012	2:11:48 AM	Helium valve closed
7/13/2012	2:11:48 AM	BCl3 valve closed
7/13/2012	2:11:48 AM	PH3 valve closed
7/13/2012	2:11:48 AM	SiCl4 pre valve closed
7/13/2012	2:11:48 AM	SiCl4 post valve closed
7/13/2012	2:11:48 AM	Main Vac valve closed
7/13/2012	2:11:48 AM	Bypass valve closed
7/13/2012	2:11:48 AM	H2 valve opened
7/13/2012	2:11:48 AM	Bubbler valve opened
7/13/2012	2:11:48 AM	Helium MFC set to  0.000000
7/13/2012	2:11:48 AM	H2 MFC set to  500.000000
7/13/2012	2:11:48 AM	BCl3 MFC set to  0.000000
7/13/2012	2:11:48 AM	PH3 MFC set to  0.000000
7/13/2012	2:11:48 AM	SiCl4 MFC set to  0.000000
7/13/2012	2:11:48 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	2:11:49 AM	Tube furnace set to 750
7/13/2012	2:26:49 AM	H2 valve closed
7/13/2012	2:26:49 AM	BCl3 valve closed
7/13/2012	2:26:49 AM	PH3 valve closed
7/13/2012	2:26:49 AM	SiCl4 pre valve closed
7/13/2012	2:26:49 AM	SiCl4 post valve closed
7/13/2012	2:26:49 AM	Main Vac valve closed
7/13/2012	2:26:49 AM	Bypass valve closed
7/13/2012	2:26:49 AM	Helium valve opened
7/13/2012	2:26:49 AM	Bubbler valve opened
7/13/2012	2:26:49 AM	Helium MFC set to  500.000000
7/13/2012	2:26:49 AM	H2 MFC set to  0.000000
7/13/2012	2:26:49 AM	BCl3 MFC set to  0.000000
7/13/2012	2:26:49 AM	PH3 MFC set to  0.000000
7/13/2012	2:26:49 AM	SiCl4 MFC set to  0.000000
7/13/2012	2:26:49 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	2:26:49 AM	Tube furnace set to 0
7/13/2012	2:46:49 AM	Helium valve closed
7/13/2012	2:46:49 AM	H2 valve closed
7/13/2012	2:46:49 AM	BCl3 valve closed
7/13/2012	2:46:49 AM	PH3 valve closed
7/13/2012	2:46:49 AM	SiCl4 pre valve closed
7/13/2012	2:46:49 AM	SiCl4 post valve closed
7/13/2012	2:46:49 AM	Main Vac valve closed
7/13/2012	2:46:49 AM	Bypass valve closed
7/13/2012	2:46:49 AM	Bubbler valve closed
7/13/2012	2:46:49 AM	Helium MFC set to  0.000000
7/13/2012	2:46:49 AM	H2 MFC set to  0.000000
7/13/2012	2:46:49 AM	BCl3 MFC set to  0.000000
7/13/2012	2:46:49 AM	PH3 MFC set to  0.000000
7/13/2012	2:46:49 AM	SiCl4 MFC set to  0.000000
7/13/2012	2:46:49 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	2:46:49 AM	Tube furnace set to 0
7/13/2012	3:06:49 AM	Helium valve closed
7/13/2012	3:06:49 AM	H2 valve closed
7/13/2012	3:06:49 AM	BCl3 valve closed
7/13/2012	3:06:49 AM	PH3 valve closed
7/13/2012	3:06:49 AM	SiCl4 pre valve closed
7/13/2012	3:06:49 AM	SiCl4 post valve closed
7/13/2012	3:06:49 AM	Main Vac valve closed
7/13/2012	3:06:49 AM	Bubbler valve closed
7/13/2012	3:06:49 AM	Bypass valve opened
7/13/2012	3:06:49 AM	Helium MFC set to  0.000000
7/13/2012	3:06:49 AM	H2 MFC set to  0.000000
7/13/2012	3:06:49 AM	BCl3 MFC set to  0.000000
7/13/2012	3:06:49 AM	PH3 MFC set to  0.000000
7/13/2012	3:06:49 AM	SiCl4 MFC set to  0.000000
7/13/2012	3:06:49 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	3:06:49 AM	Tube furnace set to 0
7/13/2012	3:07:40 AM	Helium valve closed
7/13/2012	3:07:40 AM	H2 valve closed
7/13/2012	3:07:40 AM	BCl3 valve closed
7/13/2012	3:07:40 AM	PH3 valve closed
7/13/2012	3:07:40 AM	SiCl4 pre valve closed
7/13/2012	3:07:40 AM	SiCl4 post valve closed
7/13/2012	3:07:40 AM	Main Vac valve closed
7/13/2012	3:07:40 AM	Bubbler valve closed
7/13/2012	3:07:40 AM	Bypass valve opened
7/13/2012	3:07:40 AM	Helium MFC set to  0.000000
7/13/2012	3:07:40 AM	H2 MFC set to  0.000000
7/13/2012	3:07:40 AM	BCl3 MFC set to  0.000000
7/13/2012	3:07:40 AM	PH3 MFC set to  0.000000
7/13/2012	3:07:40 AM	SiCl4 MFC set to  0.000000
7/13/2012	3:07:40 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	3:07:40 AM	Tube furnace set to 0
7/13/2012	3:08:40 AM	Helium valve closed
7/13/2012	3:08:40 AM	H2 valve closed
7/13/2012	3:08:40 AM	BCl3 valve closed
7/13/2012	3:08:40 AM	PH3 valve closed
7/13/2012	3:08:40 AM	SiCl4 pre valve closed
7/13/2012	3:08:40 AM	SiCl4 post valve closed
7/13/2012	3:08:40 AM	Bypass valve closed
7/13/2012	3:08:40 AM	Bubbler valve closed
7/13/2012	3:08:40 AM	Main Vac valve opened
7/13/2012	3:08:40 AM	Helium MFC set to  0.000000
7/13/2012	3:08:40 AM	H2 MFC set to  0.000000
7/13/2012	3:08:40 AM	BCl3 MFC set to  0.000000
7/13/2012	3:08:40 AM	PH3 MFC set to  0.000000
7/13/2012	3:08:40 AM	SiCl4 MFC set to  0.000000
7/13/2012	3:08:40 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	3:08:40 AM	Tube furnace set to 0
7/13/2012	4:08:40 AM	Run finished at 4:08 AM
7/13/2012	8:15:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2012	8:15:16 AM	Recipe started at 8:15 AM
7/13/2012	8:15:16 AM	Helium valve closed
7/13/2012	8:15:16 AM	H2 valve closed
7/13/2012	8:15:16 AM	BCl3 valve closed
7/13/2012	8:15:16 AM	PH3 valve closed
7/13/2012	8:15:17 AM	SiCl4 pre valve closed
7/13/2012	8:15:17 AM	SiCl4 post valve closed
7/13/2012	8:15:17 AM	Main Vac valve closed
7/13/2012	8:15:17 AM	Bypass valve closed
7/13/2012	8:15:17 AM	Bubbler valve closed
7/13/2012	8:15:17 AM	Helium MFC set to  0.000000
7/13/2012	8:15:17 AM	H2 MFC set to  0.000000
7/13/2012	8:15:17 AM	BCl3 MFC set to  0.000000
7/13/2012	8:15:17 AM	PH3 MFC set to  0.000000
7/13/2012	8:15:17 AM	SiCl4 MFC set to  0.000000
7/13/2012	8:15:17 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	8:15:17 AM	Tube furnace set to 0
7/13/2012	8:15:20 AM	H2 valve closed
7/13/2012	8:15:20 AM	BCl3 valve closed
7/13/2012	8:15:20 AM	PH3 valve closed
7/13/2012	8:15:20 AM	SiCl4 pre valve closed
7/13/2012	8:15:20 AM	SiCl4 post valve closed
7/13/2012	8:15:20 AM	Main Vac valve closed
7/13/2012	8:15:20 AM	Bypass valve closed
7/13/2012	8:15:20 AM	Bubbler valve closed
7/13/2012	8:15:20 AM	Helium valve opened
7/13/2012	8:15:20 AM	Helium MFC set to  500.000000
7/13/2012	8:15:20 AM	H2 MFC set to  0.000000
7/13/2012	8:15:20 AM	BCl3 MFC set to  0.000000
7/13/2012	8:15:20 AM	PH3 MFC set to  0.000000
7/13/2012	8:15:20 AM	SiCl4 MFC set to  0.000000
7/13/2012	8:15:20 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	8:15:20 AM	Tube furnace set to 0
7/13/2012	8:16:32 AM	Helium valve closed
7/13/2012	8:16:32 AM	H2 valve closed
7/13/2012	8:16:32 AM	BCl3 valve closed
7/13/2012	8:16:32 AM	PH3 valve closed
7/13/2012	8:16:32 AM	SiCl4 pre valve closed
7/13/2012	8:16:32 AM	SiCl4 post valve closed
7/13/2012	8:16:32 AM	Main Vac valve closed
7/13/2012	8:16:32 AM	Bypass valve closed
7/13/2012	8:16:32 AM	Bubbler valve closed
7/13/2012	8:16:32 AM	Helium MFC set to  0.000000
7/13/2012	8:16:32 AM	H2 MFC set to  0.000000
7/13/2012	8:16:32 AM	BCl3 MFC set to  0.000000
7/13/2012	8:16:32 AM	PH3 MFC set to  0.000000
7/13/2012	8:16:32 AM	SiCl4 MFC set to  0.000000
7/13/2012	8:16:32 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	8:16:32 AM	Tube furnace set to 0
7/13/2012	8:16:33 AM	Run finished at 8:16 AM
7/13/2012	8:16:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2012	8:21:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2012	8:21:04 AM	Recipe started at 8:21 AM
7/13/2012	8:21:04 AM	Helium valve closed
7/13/2012	8:21:04 AM	H2 valve closed
7/13/2012	8:21:04 AM	BCl3 valve closed
7/13/2012	8:21:04 AM	PH3 valve closed
7/13/2012	8:21:04 AM	SiCl4 pre valve closed
7/13/2012	8:21:04 AM	SiCl4 post valve closed
7/13/2012	8:21:04 AM	Main Vac valve closed
7/13/2012	8:21:04 AM	Bubbler valve closed
7/13/2012	8:21:04 AM	Bypass valve opened
7/13/2012	8:21:04 AM	Helium MFC set to  0.000000
7/13/2012	8:21:04 AM	H2 MFC set to  0.000000
7/13/2012	8:21:04 AM	BCl3 MFC set to  0.000000
7/13/2012	8:21:04 AM	PH3 MFC set to  0.000000
7/13/2012	8:21:04 AM	SiCl4 MFC set to  0.000000
7/13/2012	8:21:04 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	8:21:04 AM	Tube furnace set to 0
7/13/2012	8:22:15 AM	Helium valve closed
7/13/2012	8:22:15 AM	H2 valve closed
7/13/2012	8:22:15 AM	BCl3 valve closed
7/13/2012	8:22:15 AM	PH3 valve closed
7/13/2012	8:22:15 AM	SiCl4 pre valve closed
7/13/2012	8:22:15 AM	SiCl4 post valve closed
7/13/2012	8:22:15 AM	Main Vac valve closed
7/13/2012	8:22:15 AM	Bubbler valve closed
7/13/2012	8:22:15 AM	Bypass valve opened
7/13/2012	8:22:15 AM	Helium MFC set to  0.000000
7/13/2012	8:22:15 AM	H2 MFC set to  0.000000
7/13/2012	8:22:15 AM	BCl3 MFC set to  0.000000
7/13/2012	8:22:15 AM	PH3 MFC set to  0.000000
7/13/2012	8:22:15 AM	SiCl4 MFC set to  0.000000
7/13/2012	8:22:15 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	8:22:15 AM	Tube furnace set to 0
7/13/2012	8:23:15 AM	Helium valve closed
7/13/2012	8:23:15 AM	H2 valve closed
7/13/2012	8:23:15 AM	BCl3 valve closed
7/13/2012	8:23:15 AM	PH3 valve closed
7/13/2012	8:23:15 AM	SiCl4 pre valve closed
7/13/2012	8:23:15 AM	SiCl4 post valve closed
7/13/2012	8:23:15 AM	Bypass valve closed
7/13/2012	8:23:15 AM	Bubbler valve closed
7/13/2012	8:23:15 AM	Main Vac valve opened
7/13/2012	8:23:15 AM	Helium MFC set to  0.000000
7/13/2012	8:23:15 AM	H2 MFC set to  0.000000
7/13/2012	8:23:15 AM	BCl3 MFC set to  0.000000
7/13/2012	8:23:15 AM	PH3 MFC set to  0.000000
7/13/2012	8:23:15 AM	SiCl4 MFC set to  0.000000
7/13/2012	8:23:15 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	8:23:15 AM	Tube furnace set to 0
7/13/2012	8:23:16 AM	Run finished at 8:23 AM
7/13/2012	8:23:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2012	8:25:11 AM	Recipe started at 8:25 AM
7/13/2012	8:25:11 AM	Helium valve closed
7/13/2012	8:25:11 AM	H2 valve closed
7/13/2012	8:25:11 AM	BCl3 valve closed
7/13/2012	8:25:11 AM	PH3 valve closed
7/13/2012	8:25:11 AM	SiCl4 pre valve closed
7/13/2012	8:25:11 AM	SiCl4 post valve closed
7/13/2012	8:25:11 AM	Bypass valve closed
7/13/2012	8:25:11 AM	Bubbler valve closed
7/13/2012	8:25:11 AM	Main Vac valve opened
7/13/2012	8:25:11 AM	Helium MFC set to  0.000000
7/13/2012	8:25:11 AM	H2 MFC set to  0.000000
7/13/2012	8:25:11 AM	BCl3 MFC set to  0.000000
7/13/2012	8:25:11 AM	PH3 MFC set to  0.000000
7/13/2012	8:25:11 AM	SiCl4 MFC set to  0.000000
7/13/2012	8:25:11 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	8:25:11 AM	Tube furnace set to 0
7/13/2012	9:55:11 AM	Helium valve closed
7/13/2012	9:55:11 AM	H2 valve closed
7/13/2012	9:55:11 AM	BCl3 valve closed
7/13/2012	9:55:11 AM	PH3 valve closed
7/13/2012	9:55:11 AM	SiCl4 pre valve closed
7/13/2012	9:55:11 AM	SiCl4 post valve closed
7/13/2012	9:55:11 AM	Main Vac valve closed
7/13/2012	9:55:11 AM	Bypass valve closed
7/13/2012	9:55:11 AM	Bubbler valve closed
7/13/2012	9:55:11 AM	Helium MFC set to  0.000000
7/13/2012	9:55:11 AM	H2 MFC set to  0.000000
7/13/2012	9:55:11 AM	BCl3 MFC set to  0.000000
7/13/2012	9:55:11 AM	PH3 MFC set to  0.000000
7/13/2012	9:55:11 AM	SiCl4 MFC set to  0.000000
7/13/2012	9:55:11 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	9:55:12 AM	Tube furnace set to 0
7/13/2012	9:55:15 AM	Helium valve closed
7/13/2012	9:55:15 AM	BCl3 valve closed
7/13/2012	9:55:15 AM	PH3 valve closed
7/13/2012	9:55:15 AM	SiCl4 pre valve closed
7/13/2012	9:55:15 AM	SiCl4 post valve closed
7/13/2012	9:55:15 AM	Main Vac valve closed
7/13/2012	9:55:15 AM	Bypass valve closed
7/13/2012	9:55:15 AM	Bubbler valve closed
7/13/2012	9:55:15 AM	H2 valve opened
7/13/2012	9:55:15 AM	Helium MFC set to  0.000000
7/13/2012	9:55:15 AM	H2 MFC set to  500.000000
7/13/2012	9:55:15 AM	BCl3 MFC set to  0.000000
7/13/2012	9:55:15 AM	PH3 MFC set to  0.000000
7/13/2012	9:55:15 AM	SiCl4 MFC set to  0.000000
7/13/2012	9:55:15 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	9:55:15 AM	Tube furnace set to 0
7/13/2012	9:56:31 AM	Helium valve closed
7/13/2012	9:56:31 AM	BCl3 valve closed
7/13/2012	9:56:31 AM	PH3 valve closed
7/13/2012	9:56:31 AM	SiCl4 pre valve closed
7/13/2012	9:56:31 AM	SiCl4 post valve closed
7/13/2012	9:56:31 AM	Main Vac valve closed
7/13/2012	9:56:31 AM	Bypass valve closed
7/13/2012	9:56:31 AM	H2 valve opened
7/13/2012	9:56:31 AM	Bubbler valve opened
7/13/2012	9:56:31 AM	Helium MFC set to  0.000000
7/13/2012	9:56:31 AM	H2 MFC set to  500.000000
7/13/2012	9:56:31 AM	BCl3 MFC set to  0.000000
7/13/2012	9:56:31 AM	PH3 MFC set to  0.000000
7/13/2012	9:56:31 AM	SiCl4 MFC set to  0.000000
7/13/2012	9:56:31 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	9:56:31 AM	Tube furnace set to 0
7/13/2012	9:56:32 AM	Helium valve closed
7/13/2012	9:56:32 AM	BCl3 valve closed
7/13/2012	9:56:32 AM	PH3 valve closed
7/13/2012	9:56:32 AM	SiCl4 pre valve closed
7/13/2012	9:56:32 AM	SiCl4 post valve closed
7/13/2012	9:56:32 AM	Main Vac valve closed
7/13/2012	9:56:32 AM	Bypass valve closed
7/13/2012	9:56:32 AM	H2 valve opened
7/13/2012	9:56:32 AM	Bubbler valve opened
7/13/2012	9:56:32 AM	Helium MFC set to  0.000000
7/13/2012	9:56:32 AM	H2 MFC set to  500.000000
7/13/2012	9:56:32 AM	BCl3 MFC set to  0.000000
7/13/2012	9:56:32 AM	PH3 MFC set to  0.000000
7/13/2012	9:56:32 AM	SiCl4 MFC set to  0.000000
7/13/2012	9:56:32 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	9:56:32 AM	Tube furnace set to 1000
7/13/2012	10:21:32 AM	Helium valve closed
7/13/2012	10:21:32 AM	PH3 valve closed
7/13/2012	10:21:32 AM	Main Vac valve closed
7/13/2012	10:21:32 AM	Bypass valve closed
7/13/2012	10:21:32 AM	H2 valve opened
7/13/2012	10:21:32 AM	BCl3 valve opened
7/13/2012	10:21:32 AM	SiCl4 pre valve opened
7/13/2012	10:21:32 AM	SiCl4 post valve opened
7/13/2012	10:21:32 AM	Bubbler valve opened
7/13/2012	10:21:32 AM	Helium MFC set to  0.000000
7/13/2012	10:21:32 AM	H2 MFC set to  450.000000
7/13/2012	10:21:32 AM	BCl3 MFC set to  1.000000
7/13/2012	10:21:32 AM	PH3 MFC set to  0.000000
7/13/2012	10:21:32 AM	SiCl4 MFC set to  50.000000
7/13/2012	10:21:32 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	10:21:32 AM	Tube furnace set to 1000
7/13/2012	10:55:32 AM	Helium valve closed
7/13/2012	10:55:32 AM	BCl3 valve closed
7/13/2012	10:55:32 AM	PH3 valve closed
7/13/2012	10:55:32 AM	SiCl4 pre valve closed
7/13/2012	10:55:32 AM	SiCl4 post valve closed
7/13/2012	10:55:32 AM	Main Vac valve closed
7/13/2012	10:55:32 AM	Bypass valve closed
7/13/2012	10:55:32 AM	H2 valve opened
7/13/2012	10:55:32 AM	Bubbler valve opened
7/13/2012	10:55:32 AM	Helium MFC set to  0.000000
7/13/2012	10:55:32 AM	H2 MFC set to  500.000000
7/13/2012	10:55:32 AM	BCl3 MFC set to  0.000000
7/13/2012	10:55:32 AM	PH3 MFC set to  0.000000
7/13/2012	10:55:32 AM	SiCl4 MFC set to  0.000000
7/13/2012	10:55:32 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	10:55:32 AM	Tube furnace set to 750
7/13/2012	11:10:32 AM	H2 valve closed
7/13/2012	11:10:32 AM	BCl3 valve closed
7/13/2012	11:10:32 AM	PH3 valve closed
7/13/2012	11:10:32 AM	SiCl4 pre valve closed
7/13/2012	11:10:32 AM	SiCl4 post valve closed
7/13/2012	11:10:32 AM	Main Vac valve closed
7/13/2012	11:10:32 AM	Bypass valve closed
7/13/2012	11:10:32 AM	Helium valve opened
7/13/2012	11:10:32 AM	Bubbler valve opened
7/13/2012	11:10:32 AM	Helium MFC set to  500.000000
7/13/2012	11:10:32 AM	H2 MFC set to  0.000000
7/13/2012	11:10:32 AM	BCl3 MFC set to  0.000000
7/13/2012	11:10:32 AM	PH3 MFC set to  0.000000
7/13/2012	11:10:32 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:10:32 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:10:32 AM	Tube furnace set to 0
7/13/2012	11:30:32 AM	Helium valve closed
7/13/2012	11:30:32 AM	H2 valve closed
7/13/2012	11:30:32 AM	BCl3 valve closed
7/13/2012	11:30:32 AM	PH3 valve closed
7/13/2012	11:30:32 AM	SiCl4 pre valve closed
7/13/2012	11:30:32 AM	SiCl4 post valve closed
7/13/2012	11:30:32 AM	Main Vac valve closed
7/13/2012	11:30:32 AM	Bypass valve closed
7/13/2012	11:30:32 AM	Bubbler valve closed
7/13/2012	11:30:32 AM	Helium MFC set to  0.000000
7/13/2012	11:30:32 AM	H2 MFC set to  0.000000
7/13/2012	11:30:32 AM	BCl3 MFC set to  0.000000
7/13/2012	11:30:32 AM	PH3 MFC set to  0.000000
7/13/2012	11:30:32 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:30:32 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:30:33 AM	Tube furnace set to 0
7/13/2012	11:44:43 AM	Helium valve closed
7/13/2012	11:44:43 AM	H2 valve closed
7/13/2012	11:44:43 AM	BCl3 valve closed
7/13/2012	11:44:43 AM	PH3 valve closed
7/13/2012	11:44:43 AM	SiCl4 pre valve closed
7/13/2012	11:44:43 AM	SiCl4 post valve closed
7/13/2012	11:44:43 AM	Main Vac valve closed
7/13/2012	11:44:43 AM	Bubbler valve closed
7/13/2012	11:44:43 AM	Bypass valve opened
7/13/2012	11:44:43 AM	Helium MFC set to  0.000000
7/13/2012	11:44:43 AM	H2 MFC set to  0.000000
7/13/2012	11:44:43 AM	BCl3 MFC set to  0.000000
7/13/2012	11:44:43 AM	PH3 MFC set to  0.000000
7/13/2012	11:44:43 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:44:43 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:44:43 AM	Tube furnace set to 0
7/13/2012	11:45:35 AM	Helium valve closed
7/13/2012	11:45:35 AM	H2 valve closed
7/13/2012	11:45:35 AM	BCl3 valve closed
7/13/2012	11:45:35 AM	PH3 valve closed
7/13/2012	11:45:35 AM	SiCl4 pre valve closed
7/13/2012	11:45:35 AM	SiCl4 post valve closed
7/13/2012	11:45:35 AM	Main Vac valve closed
7/13/2012	11:45:35 AM	Bubbler valve closed
7/13/2012	11:45:35 AM	Bypass valve opened
7/13/2012	11:45:35 AM	Helium MFC set to  0.000000
7/13/2012	11:45:35 AM	H2 MFC set to  0.000000
7/13/2012	11:45:35 AM	BCl3 MFC set to  0.000000
7/13/2012	11:45:35 AM	PH3 MFC set to  0.000000
7/13/2012	11:45:35 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:45:35 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:45:35 AM	Tube furnace set to 0
7/13/2012	11:46:35 AM	Helium valve closed
7/13/2012	11:46:35 AM	H2 valve closed
7/13/2012	11:46:35 AM	BCl3 valve closed
7/13/2012	11:46:35 AM	PH3 valve closed
7/13/2012	11:46:35 AM	SiCl4 pre valve closed
7/13/2012	11:46:35 AM	SiCl4 post valve closed
7/13/2012	11:46:35 AM	Bypass valve closed
7/13/2012	11:46:35 AM	Bubbler valve closed
7/13/2012	11:46:35 AM	Main Vac valve opened
7/13/2012	11:46:35 AM	Helium MFC set to  0.000000
7/13/2012	11:46:35 AM	H2 MFC set to  0.000000
7/13/2012	11:46:35 AM	BCl3 MFC set to  0.000000
7/13/2012	11:46:35 AM	PH3 MFC set to  0.000000
7/13/2012	11:46:35 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:46:35 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:46:35 AM	Tube furnace set to 0
7/13/2012	11:52:21 AM	Run finished at 11:52 AM
7/13/2012	11:52:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2012	11:52:27 AM	Recipe started at 11:52 AM
7/13/2012	11:52:27 AM	Helium valve closed
7/13/2012	11:52:27 AM	H2 valve closed
7/13/2012	11:52:27 AM	BCl3 valve closed
7/13/2012	11:52:27 AM	PH3 valve closed
7/13/2012	11:52:27 AM	SiCl4 pre valve closed
7/13/2012	11:52:27 AM	SiCl4 post valve closed
7/13/2012	11:52:27 AM	Main Vac valve closed
7/13/2012	11:52:27 AM	Bypass valve closed
7/13/2012	11:52:27 AM	Bubbler valve closed
7/13/2012	11:52:27 AM	Helium MFC set to  0.000000
7/13/2012	11:52:27 AM	H2 MFC set to  0.000000
7/13/2012	11:52:27 AM	BCl3 MFC set to  0.000000
7/13/2012	11:52:27 AM	PH3 MFC set to  0.000000
7/13/2012	11:52:27 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:52:27 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:52:27 AM	Tube furnace set to 0
7/13/2012	11:52:30 AM	H2 valve closed
7/13/2012	11:52:30 AM	BCl3 valve closed
7/13/2012	11:52:30 AM	PH3 valve closed
7/13/2012	11:52:30 AM	SiCl4 pre valve closed
7/13/2012	11:52:30 AM	SiCl4 post valve closed
7/13/2012	11:52:30 AM	Main Vac valve closed
7/13/2012	11:52:30 AM	Bypass valve closed
7/13/2012	11:52:30 AM	Bubbler valve closed
7/13/2012	11:52:30 AM	Helium valve opened
7/13/2012	11:52:30 AM	Helium MFC set to  500.000000
7/13/2012	11:52:30 AM	H2 MFC set to  0.000000
7/13/2012	11:52:30 AM	BCl3 MFC set to  0.000000
7/13/2012	11:52:30 AM	PH3 MFC set to  0.000000
7/13/2012	11:52:30 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:52:30 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:52:30 AM	Tube furnace set to 0
7/13/2012	11:53:39 AM	Helium valve closed
7/13/2012	11:53:39 AM	H2 valve closed
7/13/2012	11:53:39 AM	BCl3 valve closed
7/13/2012	11:53:39 AM	PH3 valve closed
7/13/2012	11:53:39 AM	SiCl4 pre valve closed
7/13/2012	11:53:39 AM	SiCl4 post valve closed
7/13/2012	11:53:39 AM	Main Vac valve closed
7/13/2012	11:53:39 AM	Bypass valve closed
7/13/2012	11:53:39 AM	Bubbler valve closed
7/13/2012	11:53:39 AM	Helium MFC set to  0.000000
7/13/2012	11:53:39 AM	H2 MFC set to  0.000000
7/13/2012	11:53:39 AM	BCl3 MFC set to  0.000000
7/13/2012	11:53:39 AM	PH3 MFC set to  0.000000
7/13/2012	11:53:39 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:53:39 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:53:39 AM	Tube furnace set to 0
7/13/2012	11:53:40 AM	Run finished at 11:53 AM
7/13/2012	11:53:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2012	11:57:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2012	11:57:27 AM	Recipe started at 11:57 AM
7/13/2012	11:57:27 AM	Helium valve closed
7/13/2012	11:57:27 AM	H2 valve closed
7/13/2012	11:57:27 AM	BCl3 valve closed
7/13/2012	11:57:27 AM	PH3 valve closed
7/13/2012	11:57:27 AM	SiCl4 pre valve closed
7/13/2012	11:57:27 AM	SiCl4 post valve closed
7/13/2012	11:57:27 AM	Main Vac valve closed
7/13/2012	11:57:27 AM	Bubbler valve closed
7/13/2012	11:57:27 AM	Bypass valve opened
7/13/2012	11:57:27 AM	Helium MFC set to  0.000000
7/13/2012	11:57:27 AM	H2 MFC set to  0.000000
7/13/2012	11:57:27 AM	BCl3 MFC set to  0.000000
7/13/2012	11:57:27 AM	PH3 MFC set to  0.000000
7/13/2012	11:57:27 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:57:27 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:57:28 AM	Tube furnace set to 0
7/13/2012	11:58:38 AM	Helium valve closed
7/13/2012	11:58:38 AM	H2 valve closed
7/13/2012	11:58:38 AM	BCl3 valve closed
7/13/2012	11:58:38 AM	PH3 valve closed
7/13/2012	11:58:38 AM	SiCl4 pre valve closed
7/13/2012	11:58:38 AM	SiCl4 post valve closed
7/13/2012	11:58:38 AM	Main Vac valve closed
7/13/2012	11:58:38 AM	Bubbler valve closed
7/13/2012	11:58:38 AM	Bypass valve opened
7/13/2012	11:58:38 AM	Helium MFC set to  0.000000
7/13/2012	11:58:38 AM	H2 MFC set to  0.000000
7/13/2012	11:58:38 AM	BCl3 MFC set to  0.000000
7/13/2012	11:58:38 AM	PH3 MFC set to  0.000000
7/13/2012	11:58:38 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:58:38 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:58:38 AM	Tube furnace set to 0
7/13/2012	11:59:38 AM	Helium valve closed
7/13/2012	11:59:38 AM	H2 valve closed
7/13/2012	11:59:38 AM	BCl3 valve closed
7/13/2012	11:59:38 AM	PH3 valve closed
7/13/2012	11:59:38 AM	SiCl4 pre valve closed
7/13/2012	11:59:38 AM	SiCl4 post valve closed
7/13/2012	11:59:38 AM	Bypass valve closed
7/13/2012	11:59:38 AM	Bubbler valve closed
7/13/2012	11:59:38 AM	Main Vac valve opened
7/13/2012	11:59:38 AM	Helium MFC set to  0.000000
7/13/2012	11:59:38 AM	H2 MFC set to  0.000000
7/13/2012	11:59:38 AM	BCl3 MFC set to  0.000000
7/13/2012	11:59:38 AM	PH3 MFC set to  0.000000
7/13/2012	11:59:38 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:59:38 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:59:38 AM	Tube furnace set to 0
7/13/2012	11:59:39 AM	Run finished at 11:59 AM
7/13/2012	11:59:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2012	11:59:46 AM	Recipe started at 11:59 AM
7/13/2012	11:59:46 AM	Helium valve closed
7/13/2012	11:59:46 AM	H2 valve closed
7/13/2012	11:59:46 AM	BCl3 valve closed
7/13/2012	11:59:46 AM	PH3 valve closed
7/13/2012	11:59:46 AM	SiCl4 pre valve closed
7/13/2012	11:59:46 AM	SiCl4 post valve closed
7/13/2012	11:59:46 AM	Bypass valve closed
7/13/2012	11:59:46 AM	Bubbler valve closed
7/13/2012	11:59:46 AM	Main Vac valve opened
7/13/2012	11:59:46 AM	Helium MFC set to  0.000000
7/13/2012	11:59:46 AM	H2 MFC set to  0.000000
7/13/2012	11:59:46 AM	BCl3 MFC set to  0.000000
7/13/2012	11:59:46 AM	PH3 MFC set to  0.000000
7/13/2012	11:59:46 AM	SiCl4 MFC set to  0.000000
7/13/2012	11:59:46 AM	Bypass solenoid MFC set to  0.000000
7/13/2012	11:59:46 AM	Tube furnace set to 0
7/13/2012	1:29:46 PM	Helium valve closed
7/13/2012	1:29:46 PM	H2 valve closed
7/13/2012	1:29:46 PM	BCl3 valve closed
7/13/2012	1:29:46 PM	PH3 valve closed
7/13/2012	1:29:46 PM	SiCl4 pre valve closed
7/13/2012	1:29:46 PM	SiCl4 post valve closed
7/13/2012	1:29:46 PM	Main Vac valve closed
7/13/2012	1:29:46 PM	Bypass valve closed
7/13/2012	1:29:46 PM	Bubbler valve closed
7/13/2012	1:29:46 PM	Helium MFC set to  0.000000
7/13/2012	1:29:46 PM	H2 MFC set to  0.000000
7/13/2012	1:29:46 PM	BCl3 MFC set to  0.000000
7/13/2012	1:29:46 PM	PH3 MFC set to  0.000000
7/13/2012	1:29:46 PM	SiCl4 MFC set to  0.000000
7/13/2012	1:29:46 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:29:46 PM	Tube furnace set to 0
7/13/2012	1:29:49 PM	Helium valve closed
7/13/2012	1:29:49 PM	BCl3 valve closed
7/13/2012	1:29:49 PM	PH3 valve closed
7/13/2012	1:29:49 PM	SiCl4 pre valve closed
7/13/2012	1:29:49 PM	SiCl4 post valve closed
7/13/2012	1:29:49 PM	Main Vac valve closed
7/13/2012	1:29:49 PM	Bypass valve closed
7/13/2012	1:29:49 PM	Bubbler valve closed
7/13/2012	1:29:49 PM	H2 valve opened
7/13/2012	1:29:49 PM	Helium MFC set to  0.000000
7/13/2012	1:29:49 PM	H2 MFC set to  500.000000
7/13/2012	1:29:49 PM	BCl3 MFC set to  0.000000
7/13/2012	1:29:49 PM	PH3 MFC set to  0.000000
7/13/2012	1:29:49 PM	SiCl4 MFC set to  0.000000
7/13/2012	1:29:49 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:29:49 PM	Tube furnace set to 0
7/13/2012	1:31:02 PM	Helium valve closed
7/13/2012	1:31:02 PM	BCl3 valve closed
7/13/2012	1:31:02 PM	PH3 valve closed
7/13/2012	1:31:02 PM	SiCl4 pre valve closed
7/13/2012	1:31:02 PM	SiCl4 post valve closed
7/13/2012	1:31:02 PM	Main Vac valve closed
7/13/2012	1:31:02 PM	Bypass valve closed
7/13/2012	1:31:02 PM	H2 valve opened
7/13/2012	1:31:02 PM	Bubbler valve opened
7/13/2012	1:31:02 PM	Helium MFC set to  0.000000
7/13/2012	1:31:02 PM	H2 MFC set to  500.000000
7/13/2012	1:31:02 PM	BCl3 MFC set to  0.000000
7/13/2012	1:31:02 PM	PH3 MFC set to  0.000000
7/13/2012	1:31:02 PM	SiCl4 MFC set to  0.000000
7/13/2012	1:31:02 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:31:02 PM	Tube furnace set to 0
7/13/2012	1:31:03 PM	Helium valve closed
7/13/2012	1:31:03 PM	BCl3 valve closed
7/13/2012	1:31:03 PM	PH3 valve closed
7/13/2012	1:31:03 PM	SiCl4 pre valve closed
7/13/2012	1:31:03 PM	SiCl4 post valve closed
7/13/2012	1:31:03 PM	Main Vac valve closed
7/13/2012	1:31:03 PM	Bypass valve closed
7/13/2012	1:31:03 PM	H2 valve opened
7/13/2012	1:31:03 PM	Bubbler valve opened
7/13/2012	1:31:03 PM	Helium MFC set to  0.000000
7/13/2012	1:31:03 PM	H2 MFC set to  500.000000
7/13/2012	1:31:03 PM	BCl3 MFC set to  0.000000
7/13/2012	1:31:03 PM	PH3 MFC set to  0.000000
7/13/2012	1:31:03 PM	SiCl4 MFC set to  0.000000
7/13/2012	1:31:03 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:31:04 PM	Tube furnace set to 1000
7/13/2012	1:56:04 PM	Helium valve closed
7/13/2012	1:56:04 PM	PH3 valve closed
7/13/2012	1:56:04 PM	Main Vac valve closed
7/13/2012	1:56:04 PM	Bypass valve closed
7/13/2012	1:56:04 PM	H2 valve opened
7/13/2012	1:56:04 PM	BCl3 valve opened
7/13/2012	1:56:04 PM	SiCl4 pre valve opened
7/13/2012	1:56:04 PM	SiCl4 post valve opened
7/13/2012	1:56:04 PM	Bubbler valve opened
7/13/2012	1:56:04 PM	Helium MFC set to  0.000000
7/13/2012	1:56:04 PM	H2 MFC set to  450.000000
7/13/2012	1:56:04 PM	BCl3 MFC set to  1.000000
7/13/2012	1:56:04 PM	PH3 MFC set to  0.000000
7/13/2012	1:56:04 PM	SiCl4 MFC set to  50.000000
7/13/2012	1:56:04 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	1:56:04 PM	Tube furnace set to 1000
7/13/2012	2:30:04 PM	Helium valve closed
7/13/2012	2:30:04 PM	BCl3 valve closed
7/13/2012	2:30:04 PM	PH3 valve closed
7/13/2012	2:30:04 PM	SiCl4 pre valve closed
7/13/2012	2:30:04 PM	SiCl4 post valve closed
7/13/2012	2:30:04 PM	Main Vac valve closed
7/13/2012	2:30:04 PM	Bypass valve closed
7/13/2012	2:30:04 PM	H2 valve opened
7/13/2012	2:30:04 PM	Bubbler valve opened
7/13/2012	2:30:04 PM	Helium MFC set to  0.000000
7/13/2012	2:30:04 PM	H2 MFC set to  500.000000
7/13/2012	2:30:04 PM	BCl3 MFC set to  0.000000
7/13/2012	2:30:04 PM	PH3 MFC set to  0.000000
7/13/2012	2:30:04 PM	SiCl4 MFC set to  0.000000
7/13/2012	2:30:04 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	2:30:04 PM	Tube furnace set to 750
7/13/2012	2:45:04 PM	H2 valve closed
7/13/2012	2:45:04 PM	BCl3 valve closed
7/13/2012	2:45:04 PM	PH3 valve closed
7/13/2012	2:45:04 PM	SiCl4 pre valve closed
7/13/2012	2:45:04 PM	SiCl4 post valve closed
7/13/2012	2:45:04 PM	Main Vac valve closed
7/13/2012	2:45:04 PM	Bypass valve closed
7/13/2012	2:45:04 PM	Helium valve opened
7/13/2012	2:45:04 PM	Bubbler valve opened
7/13/2012	2:45:04 PM	Helium MFC set to  500.000000
7/13/2012	2:45:04 PM	H2 MFC set to  0.000000
7/13/2012	2:45:04 PM	BCl3 MFC set to  0.000000
7/13/2012	2:45:04 PM	PH3 MFC set to  0.000000
7/13/2012	2:45:04 PM	SiCl4 MFC set to  0.000000
7/13/2012	2:45:04 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	2:45:04 PM	Tube furnace set to 0
7/13/2012	3:05:04 PM	Helium valve closed
7/13/2012	3:05:04 PM	H2 valve closed
7/13/2012	3:05:04 PM	BCl3 valve closed
7/13/2012	3:05:04 PM	PH3 valve closed
7/13/2012	3:05:04 PM	SiCl4 pre valve closed
7/13/2012	3:05:04 PM	SiCl4 post valve closed
7/13/2012	3:05:04 PM	Main Vac valve closed
7/13/2012	3:05:04 PM	Bypass valve closed
7/13/2012	3:05:04 PM	Bubbler valve closed
7/13/2012	3:05:04 PM	Helium MFC set to  0.000000
7/13/2012	3:05:04 PM	H2 MFC set to  0.000000
7/13/2012	3:05:04 PM	BCl3 MFC set to  0.000000
7/13/2012	3:05:04 PM	PH3 MFC set to  0.000000
7/13/2012	3:05:04 PM	SiCl4 MFC set to  0.000000
7/13/2012	3:05:04 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	3:05:04 PM	Tube furnace set to 0
7/13/2012	3:25:04 PM	Helium valve closed
7/13/2012	3:25:04 PM	H2 valve closed
7/13/2012	3:25:04 PM	BCl3 valve closed
7/13/2012	3:25:04 PM	PH3 valve closed
7/13/2012	3:25:04 PM	SiCl4 pre valve closed
7/13/2012	3:25:04 PM	SiCl4 post valve closed
7/13/2012	3:25:04 PM	Main Vac valve closed
7/13/2012	3:25:04 PM	Bubbler valve closed
7/13/2012	3:25:04 PM	Bypass valve opened
7/13/2012	3:25:04 PM	Helium MFC set to  0.000000
7/13/2012	3:25:04 PM	H2 MFC set to  0.000000
7/13/2012	3:25:04 PM	BCl3 MFC set to  0.000000
7/13/2012	3:25:04 PM	PH3 MFC set to  0.000000
7/13/2012	3:25:04 PM	SiCl4 MFC set to  0.000000
7/13/2012	3:25:04 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	3:25:04 PM	Tube furnace set to 0
7/13/2012	3:25:56 PM	Helium valve closed
7/13/2012	3:25:56 PM	H2 valve closed
7/13/2012	3:25:56 PM	BCl3 valve closed
7/13/2012	3:25:56 PM	PH3 valve closed
7/13/2012	3:25:56 PM	SiCl4 pre valve closed
7/13/2012	3:25:56 PM	SiCl4 post valve closed
7/13/2012	3:25:56 PM	Main Vac valve closed
7/13/2012	3:25:56 PM	Bubbler valve closed
7/13/2012	3:25:56 PM	Bypass valve opened
7/13/2012	3:25:56 PM	Helium MFC set to  0.000000
7/13/2012	3:25:56 PM	H2 MFC set to  0.000000
7/13/2012	3:25:56 PM	BCl3 MFC set to  0.000000
7/13/2012	3:25:56 PM	PH3 MFC set to  0.000000
7/13/2012	3:25:56 PM	SiCl4 MFC set to  0.000000
7/13/2012	3:25:56 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	3:25:56 PM	Tube furnace set to 0
7/13/2012	3:26:56 PM	Helium valve closed
7/13/2012	3:26:56 PM	H2 valve closed
7/13/2012	3:26:56 PM	BCl3 valve closed
7/13/2012	3:26:56 PM	PH3 valve closed
7/13/2012	3:26:56 PM	SiCl4 pre valve closed
7/13/2012	3:26:56 PM	SiCl4 post valve closed
7/13/2012	3:26:56 PM	Bypass valve closed
7/13/2012	3:26:56 PM	Bubbler valve closed
7/13/2012	3:26:57 PM	Main Vac valve opened
7/13/2012	3:26:57 PM	Helium MFC set to  0.000000
7/13/2012	3:26:57 PM	H2 MFC set to  0.000000
7/13/2012	3:26:57 PM	BCl3 MFC set to  0.000000
7/13/2012	3:26:57 PM	PH3 MFC set to  0.000000
7/13/2012	3:26:57 PM	SiCl4 MFC set to  0.000000
7/13/2012	3:26:57 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	3:26:57 PM	Tube furnace set to 0
7/13/2012	4:04:57 PM	Run finished at 4:04 PM
7/13/2012	4:07:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2012	4:07:34 PM	Recipe started at 4:07 PM
7/13/2012	4:07:34 PM	Helium valve closed
7/13/2012	4:07:34 PM	H2 valve closed
7/13/2012	4:07:34 PM	BCl3 valve closed
7/13/2012	4:07:34 PM	PH3 valve closed
7/13/2012	4:07:34 PM	SiCl4 pre valve closed
7/13/2012	4:07:34 PM	SiCl4 post valve closed
7/13/2012	4:07:34 PM	Main Vac valve closed
7/13/2012	4:07:34 PM	Bypass valve closed
7/13/2012	4:07:34 PM	Bubbler valve closed
7/13/2012	4:07:34 PM	Helium MFC set to  0.000000
7/13/2012	4:07:34 PM	H2 MFC set to  0.000000
7/13/2012	4:07:34 PM	BCl3 MFC set to  0.000000
7/13/2012	4:07:34 PM	PH3 MFC set to  0.000000
7/13/2012	4:07:34 PM	SiCl4 MFC set to  0.000000
7/13/2012	4:07:34 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	4:07:34 PM	Tube furnace set to 0
7/13/2012	4:07:37 PM	H2 valve closed
7/13/2012	4:07:37 PM	BCl3 valve closed
7/13/2012	4:07:37 PM	PH3 valve closed
7/13/2012	4:07:37 PM	SiCl4 pre valve closed
7/13/2012	4:07:37 PM	SiCl4 post valve closed
7/13/2012	4:07:37 PM	Main Vac valve closed
7/13/2012	4:07:37 PM	Bypass valve closed
7/13/2012	4:07:37 PM	Bubbler valve closed
7/13/2012	4:07:37 PM	Helium valve opened
7/13/2012	4:07:37 PM	Helium MFC set to  500.000000
7/13/2012	4:07:37 PM	H2 MFC set to  0.000000
7/13/2012	4:07:37 PM	BCl3 MFC set to  0.000000
7/13/2012	4:07:37 PM	PH3 MFC set to  0.000000
7/13/2012	4:07:37 PM	SiCl4 MFC set to  0.000000
7/13/2012	4:07:37 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	4:07:37 PM	Tube furnace set to 0
7/13/2012	4:08:46 PM	Helium valve closed
7/13/2012	4:08:46 PM	H2 valve closed
7/13/2012	4:08:46 PM	BCl3 valve closed
7/13/2012	4:08:46 PM	PH3 valve closed
7/13/2012	4:08:46 PM	SiCl4 pre valve closed
7/13/2012	4:08:46 PM	SiCl4 post valve closed
7/13/2012	4:08:46 PM	Main Vac valve closed
7/13/2012	4:08:46 PM	Bypass valve closed
7/13/2012	4:08:46 PM	Bubbler valve closed
7/13/2012	4:08:46 PM	Helium MFC set to  0.000000
7/13/2012	4:08:46 PM	H2 MFC set to  0.000000
7/13/2012	4:08:46 PM	BCl3 MFC set to  0.000000
7/13/2012	4:08:46 PM	PH3 MFC set to  0.000000
7/13/2012	4:08:46 PM	SiCl4 MFC set to  0.000000
7/13/2012	4:08:46 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	4:08:46 PM	Tube furnace set to 0
7/13/2012	4:08:47 PM	Run finished at 4:08 PM
7/13/2012	4:08:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2012	4:14:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2012	4:14:35 PM	Recipe started at 4:14 PM
7/13/2012	4:14:35 PM	Helium valve closed
7/13/2012	4:14:35 PM	H2 valve closed
7/13/2012	4:14:35 PM	BCl3 valve closed
7/13/2012	4:14:35 PM	PH3 valve closed
7/13/2012	4:14:35 PM	SiCl4 pre valve closed
7/13/2012	4:14:35 PM	SiCl4 post valve closed
7/13/2012	4:14:35 PM	Main Vac valve closed
7/13/2012	4:14:35 PM	Bubbler valve closed
7/13/2012	4:14:35 PM	Bypass valve opened
7/13/2012	4:14:35 PM	Helium MFC set to  0.000000
7/13/2012	4:14:35 PM	H2 MFC set to  0.000000
7/13/2012	4:14:35 PM	BCl3 MFC set to  0.000000
7/13/2012	4:14:35 PM	PH3 MFC set to  0.000000
7/13/2012	4:14:35 PM	SiCl4 MFC set to  0.000000
7/13/2012	4:14:35 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	4:14:35 PM	Tube furnace set to 0
7/13/2012	4:15:47 PM	Helium valve closed
7/13/2012	4:15:47 PM	H2 valve closed
7/13/2012	4:15:47 PM	BCl3 valve closed
7/13/2012	4:15:47 PM	PH3 valve closed
7/13/2012	4:15:47 PM	SiCl4 pre valve closed
7/13/2012	4:15:48 PM	SiCl4 post valve closed
7/13/2012	4:15:48 PM	Main Vac valve closed
7/13/2012	4:15:48 PM	Bubbler valve closed
7/13/2012	4:15:48 PM	Bypass valve opened
7/13/2012	4:15:48 PM	Helium MFC set to  0.000000
7/13/2012	4:15:48 PM	H2 MFC set to  0.000000
7/13/2012	4:15:48 PM	BCl3 MFC set to  0.000000
7/13/2012	4:15:48 PM	PH3 MFC set to  0.000000
7/13/2012	4:15:48 PM	SiCl4 MFC set to  0.000000
7/13/2012	4:15:48 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	4:15:48 PM	Tube furnace set to 0
7/13/2012	4:16:48 PM	Helium valve closed
7/13/2012	4:16:48 PM	H2 valve closed
7/13/2012	4:16:48 PM	BCl3 valve closed
7/13/2012	4:16:48 PM	PH3 valve closed
7/13/2012	4:16:48 PM	SiCl4 pre valve closed
7/13/2012	4:16:48 PM	SiCl4 post valve closed
7/13/2012	4:16:48 PM	Bypass valve closed
7/13/2012	4:16:48 PM	Bubbler valve closed
7/13/2012	4:16:48 PM	Main Vac valve opened
7/13/2012	4:16:48 PM	Helium MFC set to  0.000000
7/13/2012	4:16:48 PM	H2 MFC set to  0.000000
7/13/2012	4:16:48 PM	BCl3 MFC set to  0.000000
7/13/2012	4:16:48 PM	PH3 MFC set to  0.000000
7/13/2012	4:16:48 PM	SiCl4 MFC set to  0.000000
7/13/2012	4:16:48 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	4:16:48 PM	Tube furnace set to 0
7/13/2012	4:16:49 PM	Run finished at 4:16 PM
7/13/2012	4:16:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2012	5:54:13 PM	Main Vac valve closed
7/13/2012	5:54:24 PM	Main Vac valve opened
7/13/2012	5:55:38 PM	Recipe started at 5:55 PM
7/13/2012	5:55:38 PM	Helium valve closed
7/13/2012	5:55:38 PM	H2 valve closed
7/13/2012	5:55:38 PM	BCl3 valve closed
7/13/2012	5:55:38 PM	PH3 valve closed
7/13/2012	5:55:38 PM	SiCl4 pre valve closed
7/13/2012	5:55:38 PM	SiCl4 post valve closed
7/13/2012	5:55:38 PM	Bypass valve closed
7/13/2012	5:55:38 PM	Bubbler valve closed
7/13/2012	5:55:38 PM	Main Vac valve opened
7/13/2012	5:55:38 PM	Helium MFC set to  0.000000
7/13/2012	5:55:38 PM	H2 MFC set to  0.000000
7/13/2012	5:55:38 PM	BCl3 MFC set to  0.000000
7/13/2012	5:55:38 PM	PH3 MFC set to  0.000000
7/13/2012	5:55:38 PM	SiCl4 MFC set to  0.000000
7/13/2012	5:55:38 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	5:55:39 PM	Tube furnace set to 0
7/13/2012	5:55:42 PM	Helium valve closed
7/13/2012	5:55:42 PM	H2 valve closed
7/13/2012	5:55:42 PM	BCl3 valve closed
7/13/2012	5:55:42 PM	PH3 valve closed
7/13/2012	5:55:42 PM	SiCl4 pre valve closed
7/13/2012	5:55:42 PM	SiCl4 post valve closed
7/13/2012	5:55:42 PM	Main Vac valve closed
7/13/2012	5:55:42 PM	Bypass valve closed
7/13/2012	5:55:42 PM	Bubbler valve closed
7/13/2012	5:55:42 PM	Helium MFC set to  0.000000
7/13/2012	5:55:42 PM	H2 MFC set to  0.000000
7/13/2012	5:55:42 PM	BCl3 MFC set to  0.000000
7/13/2012	5:55:42 PM	PH3 MFC set to  0.000000
7/13/2012	5:55:42 PM	SiCl4 MFC set to  0.000000
7/13/2012	5:55:42 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	5:55:42 PM	Tube furnace set to 0
7/13/2012	5:55:45 PM	Helium valve closed
7/13/2012	5:55:45 PM	BCl3 valve closed
7/13/2012	5:55:45 PM	PH3 valve closed
7/13/2012	5:55:45 PM	SiCl4 pre valve closed
7/13/2012	5:55:45 PM	SiCl4 post valve closed
7/13/2012	5:55:45 PM	Main Vac valve closed
7/13/2012	5:55:45 PM	Bypass valve closed
7/13/2012	5:55:45 PM	Bubbler valve closed
7/13/2012	5:55:45 PM	H2 valve opened
7/13/2012	5:55:45 PM	Helium MFC set to  0.000000
7/13/2012	5:55:45 PM	H2 MFC set to  500.000000
7/13/2012	5:55:45 PM	BCl3 MFC set to  0.000000
7/13/2012	5:55:45 PM	PH3 MFC set to  0.000000
7/13/2012	5:55:45 PM	SiCl4 MFC set to  0.000000
7/13/2012	5:55:45 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	5:55:45 PM	Tube furnace set to 0
7/13/2012	5:56:59 PM	Helium valve closed
7/13/2012	5:56:59 PM	BCl3 valve closed
7/13/2012	5:56:59 PM	PH3 valve closed
7/13/2012	5:56:59 PM	SiCl4 pre valve closed
7/13/2012	5:56:59 PM	SiCl4 post valve closed
7/13/2012	5:56:59 PM	Main Vac valve closed
7/13/2012	5:56:59 PM	Bypass valve closed
7/13/2012	5:56:59 PM	H2 valve opened
7/13/2012	5:56:59 PM	Bubbler valve opened
7/13/2012	5:56:59 PM	Helium MFC set to  0.000000
7/13/2012	5:56:59 PM	H2 MFC set to  500.000000
7/13/2012	5:56:59 PM	BCl3 MFC set to  0.000000
7/13/2012	5:56:59 PM	PH3 MFC set to  0.000000
7/13/2012	5:56:59 PM	SiCl4 MFC set to  0.000000
7/13/2012	5:56:59 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	5:56:59 PM	Tube furnace set to 0
7/13/2012	5:57:00 PM	Helium valve closed
7/13/2012	5:57:00 PM	BCl3 valve closed
7/13/2012	5:57:00 PM	PH3 valve closed
7/13/2012	5:57:01 PM	SiCl4 pre valve closed
7/13/2012	5:57:01 PM	SiCl4 post valve closed
7/13/2012	5:57:01 PM	Main Vac valve closed
7/13/2012	5:57:01 PM	Bypass valve closed
7/13/2012	5:57:01 PM	H2 valve opened
7/13/2012	5:57:01 PM	Bubbler valve opened
7/13/2012	5:57:01 PM	Helium MFC set to  0.000000
7/13/2012	5:57:01 PM	H2 MFC set to  500.000000
7/13/2012	5:57:01 PM	BCl3 MFC set to  0.000000
7/13/2012	5:57:01 PM	PH3 MFC set to  0.000000
7/13/2012	5:57:01 PM	SiCl4 MFC set to  0.000000
7/13/2012	5:57:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	5:57:01 PM	Tube furnace set to 1000
7/13/2012	6:22:01 PM	Helium valve closed
7/13/2012	6:22:01 PM	PH3 valve closed
7/13/2012	6:22:01 PM	Main Vac valve closed
7/13/2012	6:22:01 PM	Bypass valve closed
7/13/2012	6:22:01 PM	H2 valve opened
7/13/2012	6:22:01 PM	BCl3 valve opened
7/13/2012	6:22:01 PM	SiCl4 pre valve opened
7/13/2012	6:22:01 PM	SiCl4 post valve opened
7/13/2012	6:22:01 PM	Bubbler valve opened
7/13/2012	6:22:01 PM	Helium MFC set to  0.000000
7/13/2012	6:22:01 PM	H2 MFC set to  450.000000
7/13/2012	6:22:01 PM	BCl3 MFC set to  1.000000
7/13/2012	6:22:01 PM	PH3 MFC set to  0.000000
7/13/2012	6:22:01 PM	SiCl4 MFC set to  50.000000
7/13/2012	6:22:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	6:22:01 PM	Tube furnace set to 1000
7/13/2012	6:52:01 PM	Helium valve closed
7/13/2012	6:52:01 PM	BCl3 valve closed
7/13/2012	6:52:01 PM	Main Vac valve closed
7/13/2012	6:52:01 PM	Bypass valve closed
7/13/2012	6:52:01 PM	H2 valve opened
7/13/2012	6:52:01 PM	PH3 valve opened
7/13/2012	6:52:01 PM	SiCl4 pre valve opened
7/13/2012	6:52:01 PM	SiCl4 post valve opened
7/13/2012	6:52:01 PM	Bubbler valve opened
7/13/2012	6:52:01 PM	Helium MFC set to  0.000000
7/13/2012	6:52:01 PM	H2 MFC set to  430.000000
7/13/2012	6:52:01 PM	BCl3 MFC set to  0.000000
7/13/2012	6:52:01 PM	PH3 MFC set to  20.000000
7/13/2012	6:52:01 PM	SiCl4 MFC set to  50.000000
7/13/2012	6:52:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	6:52:01 PM	Tube furnace set to 1000
7/13/2012	6:56:01 PM	Helium valve closed
7/13/2012	6:56:01 PM	BCl3 valve closed
7/13/2012	6:56:01 PM	PH3 valve closed
7/13/2012	6:56:01 PM	SiCl4 pre valve closed
7/13/2012	6:56:01 PM	SiCl4 post valve closed
7/13/2012	6:56:01 PM	Main Vac valve closed
7/13/2012	6:56:01 PM	Bypass valve closed
7/13/2012	6:56:01 PM	H2 valve opened
7/13/2012	6:56:01 PM	Bubbler valve opened
7/13/2012	6:56:01 PM	Helium MFC set to  0.000000
7/13/2012	6:56:01 PM	H2 MFC set to  500.000000
7/13/2012	6:56:01 PM	BCl3 MFC set to  0.000000
7/13/2012	6:56:01 PM	PH3 MFC set to  0.000000
7/13/2012	6:56:01 PM	SiCl4 MFC set to  0.000000
7/13/2012	6:56:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	6:56:01 PM	Tube furnace set to 750
7/13/2012	7:11:01 PM	H2 valve closed
7/13/2012	7:11:01 PM	BCl3 valve closed
7/13/2012	7:11:01 PM	PH3 valve closed
7/13/2012	7:11:01 PM	SiCl4 pre valve closed
7/13/2012	7:11:01 PM	SiCl4 post valve closed
7/13/2012	7:11:01 PM	Main Vac valve closed
7/13/2012	7:11:01 PM	Bypass valve closed
7/13/2012	7:11:01 PM	Helium valve opened
7/13/2012	7:11:01 PM	Bubbler valve opened
7/13/2012	7:11:01 PM	Helium MFC set to  500.000000
7/13/2012	7:11:01 PM	H2 MFC set to  0.000000
7/13/2012	7:11:01 PM	BCl3 MFC set to  0.000000
7/13/2012	7:11:01 PM	PH3 MFC set to  0.000000
7/13/2012	7:11:01 PM	SiCl4 MFC set to  0.000000
7/13/2012	7:11:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	7:11:02 PM	Tube furnace set to 0
7/13/2012	7:31:02 PM	Helium valve closed
7/13/2012	7:31:02 PM	H2 valve closed
7/13/2012	7:31:02 PM	BCl3 valve closed
7/13/2012	7:31:02 PM	PH3 valve closed
7/13/2012	7:31:02 PM	SiCl4 pre valve closed
7/13/2012	7:31:02 PM	SiCl4 post valve closed
7/13/2012	7:31:02 PM	Main Vac valve closed
7/13/2012	7:31:02 PM	Bypass valve closed
7/13/2012	7:31:02 PM	Bubbler valve closed
7/13/2012	7:31:02 PM	Helium MFC set to  0.000000
7/13/2012	7:31:02 PM	H2 MFC set to  0.000000
7/13/2012	7:31:02 PM	BCl3 MFC set to  0.000000
7/13/2012	7:31:02 PM	PH3 MFC set to  0.000000
7/13/2012	7:31:02 PM	SiCl4 MFC set to  0.000000
7/13/2012	7:31:02 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	7:31:02 PM	Tube furnace set to 0
7/13/2012	7:51:02 PM	Helium valve closed
7/13/2012	7:51:02 PM	H2 valve closed
7/13/2012	7:51:02 PM	BCl3 valve closed
7/13/2012	7:51:02 PM	PH3 valve closed
7/13/2012	7:51:02 PM	SiCl4 pre valve closed
7/13/2012	7:51:02 PM	SiCl4 post valve closed
7/13/2012	7:51:02 PM	Main Vac valve closed
7/13/2012	7:51:02 PM	Bubbler valve closed
7/13/2012	7:51:02 PM	Bypass valve opened
7/13/2012	7:51:02 PM	Helium MFC set to  0.000000
7/13/2012	7:51:02 PM	H2 MFC set to  0.000000
7/13/2012	7:51:02 PM	BCl3 MFC set to  0.000000
7/13/2012	7:51:02 PM	PH3 MFC set to  0.000000
7/13/2012	7:51:02 PM	SiCl4 MFC set to  0.000000
7/13/2012	7:51:02 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	7:51:02 PM	Tube furnace set to 0
7/13/2012	7:51:53 PM	Helium valve closed
7/13/2012	7:51:53 PM	H2 valve closed
7/13/2012	7:51:53 PM	BCl3 valve closed
7/13/2012	7:51:53 PM	PH3 valve closed
7/13/2012	7:51:53 PM	SiCl4 pre valve closed
7/13/2012	7:51:53 PM	SiCl4 post valve closed
7/13/2012	7:51:53 PM	Main Vac valve closed
7/13/2012	7:51:53 PM	Bubbler valve closed
7/13/2012	7:51:53 PM	Bypass valve opened
7/13/2012	7:51:53 PM	Helium MFC set to  0.000000
7/13/2012	7:51:53 PM	H2 MFC set to  0.000000
7/13/2012	7:51:53 PM	BCl3 MFC set to  0.000000
7/13/2012	7:51:53 PM	PH3 MFC set to  0.000000
7/13/2012	7:51:53 PM	SiCl4 MFC set to  0.000000
7/13/2012	7:51:53 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	7:51:53 PM	Tube furnace set to 0
7/13/2012	7:52:53 PM	Helium valve closed
7/13/2012	7:52:53 PM	H2 valve closed
7/13/2012	7:52:53 PM	BCl3 valve closed
7/13/2012	7:52:53 PM	PH3 valve closed
7/13/2012	7:52:53 PM	SiCl4 pre valve closed
7/13/2012	7:52:53 PM	SiCl4 post valve closed
7/13/2012	7:52:53 PM	Bypass valve closed
7/13/2012	7:52:53 PM	Bubbler valve closed
7/13/2012	7:52:53 PM	Main Vac valve opened
7/13/2012	7:52:53 PM	Helium MFC set to  0.000000
7/13/2012	7:52:53 PM	H2 MFC set to  0.000000
7/13/2012	7:52:53 PM	BCl3 MFC set to  0.000000
7/13/2012	7:52:53 PM	PH3 MFC set to  0.000000
7/13/2012	7:52:53 PM	SiCl4 MFC set to  0.000000
7/13/2012	7:52:53 PM	Bypass solenoid MFC set to  0.000000
7/13/2012	7:52:54 PM	Tube furnace set to 0
7/13/2012	8:52:54 PM	Run finished at 8:52 PM
